Product Name:Sic Epitaxial Wafer
Surface Orientation:Off-Axis:4°toward <11-20>±0.5 °
Primary Flat Length:47.5mm ± 1.5mm
Crystal Form:4H
Product Name:2inch diameterSilicon Carbide (SiC)Substrate Specification
Diameter:50.8mm±0.38mm
Product Name:6 inch diameter Silicon Carbide (SiC) Substrate Specification
Primary Flat Orientation:{10-10}±5.0°
Crystal Form:4H
Crystal Form:4H
Product Name:Sic Epitaxial Wafer
Diameter:150.0mm +0mm/-0.2mm
Product Name:Sic Epitaxial Wafer
Primary Flat Length:47.5mm ± 1.5mm
Diameter:150.0mm +0mm/-0.2mm
Crystal Form:4H
Product Name:Sic Epitaxial Wafer
Diameter:150.0mm +0mm/-0.2mm
Diameter:150.0mm +0mm/-0.2mm
Product Name:SiC Epitaxial Wafer
Surface Orientation:Off-Axis:4°toward <11-20>±0.5 °
Crystal Form:4H
Product Name:Sic Epitaxial Wafer
Diameter:150.0mm +0mm/-0.2mm
Product Name:SiC Epitaxial Wafer
Crystal Form:4H
Polytype:None Permitted
Crystal Form:4H
Product Name:Sic Epitaxial Wafer
Diameter:150.0mm +0mm/-0.2mm
Product Name:SiC Epitaxial Wafer
Crystal Form:4H
Diameter:150.0 mm +0mm/-0.2mm
Crystal Form:4H
Surface Metal Contamination:(Al, Cr, Fe, Ni, Cu, Zn, Pb, Na, K, Ti, Ca ,V, Mn) ≤1E11cm⁻²
Product Name:Sic Epitaxial Wafer